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Tencor AlphaStep 500
Clark D15The Tencor Profilometer is a metrology tool that generates a line-scan topographical profile of the surface of a sample. This is done by a stylus which touches the surface of a sample and runs across a prescribed length (up to 5 mm). Vertical resolution is 1 Å with a 13 µm range or 25 Å with a 300 µm range.
For rates information, please see the rates page.
Primary Contact
Steve Kriske
607/255-2367
sjk27@cornell.edu
Clark Hall, Room D-21
Steve Kriske
607/255-2367
sjk27@cornell.edu
Clark Hall, Room D-21
Secondary Contact
Jonathan Shu
607/255-9833
jbs24@cornell.edu
Clark Hall, Room 633