HomeFacilitiesInstrumentsUser InstrumentsSurface Analysis and CharacterizationTencor AlphaStep 500

Tencor AlphaStep 500

20121211103827_image.jpg-thumbClark D15

The Tencor Profilometer is a metrology tool that generates a line-scan topographical profile of the surface of a sample. This is done by a stylus which touches the surface of a sample and runs across a prescribed length (up to 5 mm). Vertical resolution is 1 Å with a 13 µm range or 25 Å with a 300 µm range.

For rates information, please see the rates page.
Primary Contact

Steve Kriske
Clark Hall, Room D-21

Secondary Contact

Jonathan Shu
Clark Hall, Room 633
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