This is used for quantitative elemental analysis of samples on a micron scale.  Samples should be flat and are frequently polished to one micron grit or better.  Holders are available for round mounts measuring one inch, one inch and a quarter, or one inch and a half.  A special holder for unusually shaped specimens is also available.
Nonconducting specimens are normally coated with carbon using the evaporator located in 231 Duffield Hall.There are 5 wavelength dispersive X-ray spectrometers (WDS), an energy dispersive X-ray detector (EDS).  The scanning system forms images from secondary and backscattered electrons, and maps from X-rays.